IEVref:
841-34-08
ID:
Language:
en
Status:
Standard
Term:
heating in pulsating plasma
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition:
heating in plasma diffusive treatment or PACVD process with activation of glow discharge by means of pulse voltage
Publication
date
:
2004-09
Source
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
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Domain4:
Domain5:
heating in plasma diffusive treatment or PACVD process with activation of glow discharge by means of pulse voltage