IEVref:561-07-20ID:
Language:enStatus: Standard
Term: orientation flat
Synonym1: OF
[Preferred]
Synonym2:
Synonym3:
Symbol:
Definition: flat portion of a wafer perimeter indicating the crystal orientation

Figure 1 – Wafer sketch and measurement points

Note 1 to entry: Generally, the OF corresponds to the SAW propagation direction.


Publication date:2021-08
Source
Replaces:561-07-20:2014-11
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5: