IEVref:561-07-31ID:
Language:enStatus: Standard
Term: site, <material for SAW devices>
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Definition: square area on the front surface of the wafer with one side parallel to the orientation flat

Note 1 to entry: Flatness parameters are assessed either globally for the FQA, or for each site individually.


Publication date:2021-08
Source
Replaces:561-07-31:2014-11
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