| maximum distance between the highest point and the lowest point on the front surface of an unclamped wafer from the reference plane, where the least-squares fit reference plane is used
Note 1 to entry: The sori describes the deformation of a wafer that is not clamped, as shown in Figure 1.
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Figure 1 – Schematic diagram of a sori
Note 2 to entry: The reference plane is defined by the least-squares fit to the front surface of the wafer as described in IEV 561-07-27, Note 1 to entry, item 3.
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