IEVref:561-07-36ID:
Language:enStatus: Standard
Term: thickness variation for five points
Synonym1: TV5
[Preferred]
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Definition: difference between the maximum thickness and the minimum thickness at the centre and four peripheral points of the wafer as shown in Figure 1

Figure 1 – Wafer sketch and measurement points


Publication date:2021-08
Source
Replaces:561-07-36:2014-11
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