IEVref:561-07-29ID:
Language:enStatus: Standard
Term: secondary flat
Synonym1: SF
[Preferred]
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Definition: flat portion of a wafer perimeter shorter than the orientation flat

Figure 1 – Wafer sketch and measurement points

Note 1 to entry: When present, the SF indicates wafer polarity and can serve to distinguish different wafer cuts.


Publication date:2021-08
Source
Replaces:561-07-29:2014-11
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