IEVref:561-07-21ID:
Language:enStatus: Standard
Term: percent local thickness variation
Synonym1: PLTV
Synonym2:
Synonym3:
Symbol:
Definition: percentage of sites whose local thickness variation values fall within the specified value

Note 1 to entry: As with the LTV, measurement is performed on a clamped wafer with the reference plane defined in IEV 561-07-27, Note 1 to entry, item 1.


Publication date:2021-08
Source
Replaces:561-07-21:2014-11
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5: