IEVref:
561-07-02
ID:
Language:
en
Status:
Standard
Term:
back surface roughness
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition:
roughness that scatters and suppresses spurious bulk waves at the back surface of a wafer
Publication
date
:
2021-08
Source
IEC 62276:2016, 3.6.4, modified — Grammar corrected and "of a wafer" added.
Replaces:
561-07-02:2014-11
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5:
roughness that scatters and suppresses spurious bulk waves at the back surface of a wafer