IEVref:
561-07-09
ID:
Language:
en
Status:
Standard
Term:
diameter of wafer
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition:
diameter of the circular portion of a wafer excluding the
orientation flat
and the
secondary flat
Publication
date
:
2021-08
Source
Replaces:
561-07-09:2014-11
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5:
diameter of the circular portion of a wafer excluding the
orientation flat
and the
secondary flat