IEVref:561-07-37ID:
Language:enStatus: Standard
Term: total thickness variation
Synonym1: TTV
[Preferred]
Synonym2:
Synonym3:
Symbol:
Definition: difference between the maximum thickness d1 and the minimum thickness d2 of a wafer as shown in Figure 1

X

Figure 1 – Schematic diagram of a TTV

Note 1 to entry: Measurement of TTV is performed on a clamped wafer with the reference plane as defined in IEV 561-07-27, Note 1 to entry, item 1.


Publication date:2021-08
Source
Replaces:561-07-37:2014-11
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
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