| Definition: | maximum distance between a point on the wafer surface within the fixed quality area and the three-point reference plane
Note 1 to entry: The three-point reference plane is defined in IEV 561-07-27, Note 1 to entry, item 2.
Note 2 to entry: If the point on the wafer surface is above the three-point reference plane, the FPD is positive. If that point is below the three-point reference plane, the FPD is negative.
|