IEVref:
561-07-34
ID:
Language:
en
Status:
Standard
Term:
surface orientation
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition:
crystallographic orientation of the axis perpendicular to the polished surface of the wafer
Publication
date
:
2021-08
Source
Replaces:
561-07-34:2014-11
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5:
crystallographic orientation of the axis perpendicular to the polished surface of the wafer