IEVref:841-31-08ID:
Language:enStatus: Standard
Term: low pressure plasma
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition: non equilibrium plasma at a pressure generally lower than 105 Pa, e.g. ionosphere, discharge area in gas discharge tubes and ion furnaces


Publication date:2004-09
Source
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5: