IEVref:
841-31-08
ID:
Language:
en
Status:
Standard
Term:
low pressure plasma
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition:
non equilibrium plasma at a pressure generally lower than 10
5
Pa, e.g. ionosphere, discharge area in gas discharge tubes and ion furnaces
Publication
date
:
2004-09
Source
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5:
non equilibrium plasma at a pressure generally lower than 10
5
Pa, e.g. ionosphere, discharge area in gas discharge tubes and ion furnaces