Definition: | deformation of an unclamped wafer, defined as the maximum difference between a point on the front surface and a reference plane X Figure 27 – Schematic diagram of warp Note 1 to entry: The reference plane is defined by three points as described in 561-07-27, Note 1 to entry, item 2. Warp is a bulk property of a wafer and not of the exposed surface alone.
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