IEVref:
523-08-02
ID:
Language:
en
Status:
Standard
Term:
MOEMS
Synonym1:
micro-optical-electromechanical systems
Synonym2:
Synonym3:
Symbol:
Definition:
application of MEMS technology in the field of optics
Note 1 to entry: This note applies to the French language only.
Publication
date
:
2018-12
Source
IEC 62047-1:2016, 2.8.3
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5:
application of MEMS technology in the field of optics
Note 1 to entry: This note applies to the French language only.