IEVref:
521-03-15
ID:
Language:
en
Status:
Standard
Term:
vapour-phase deposition technique
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition:
deposition of conducting, insulating or semiconducting films on to solid substrates from a source material in the vapour phase by physical deposition or chemical reaction
Publication
date
:
2002-05
Source
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5:
deposition of conducting, insulating or semiconducting films on to solid substrates from a source material in the vapour phase by physical deposition or chemical reaction