IEVref:841-22-10ID:
Language:enStatus: Standard
Term: ion implantation
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition: modification of outer layers of solids by introducing accelerated ionized atoms


Publication date:2004-09
Source521-03-14 MOD
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5: