IEVref:
841-22-07
ID:
Language:
en
Status:
Standard
Term:
chemical vapour deposition
Synonym1:
CVD (abbreviation)
Synonym2:
Synonym3:
Symbol:
Definition:
process in which vapours and gases react chemically to produce deposits at the surface of a substrate
Publication
date
:
2004-09
Source
731-22-53 MOD
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5:
process in which vapours and gases react chemically to produce deposits at the surface of a substrate