IEVref:
521-03-11
ID:
Language:
en
Status:
Standard
Term:
mesa technique
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition:
formation of a junction in the shape of a raised plateau by successive impurity diffusions or alloying and then etching away material in the regions surrounding the plateau
Publication
date
:
2002-05
Source
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5:
formation of a junction in the shape of a raised plateau by successive impurity diffusions or alloying and then etching away material in the regions surrounding the plateau