Language:enStatus: Standard
Term: scanning probe microscope
Synonym1: SPM
Definition: microscope that uses a probe with a tip of atomic scale and scans it in a raster pattern close to the specimen for measuring physical quantities between the probe and the surface to obtain an image

Note 1 to entry: By approaching a sharply pointed probe tip to the surface of the specimen, various physical forces that work between the probe and the specimen can be measured at the resolution of an atomic scale. In general, the probe is moved over the surface of the specimen in a raster pattern while maintaining the measured physical quantity at a constant value, and the displacement of the probe in so doing is used as the data for drawing a fine image of the specimen. This is the common principle of different types of scanning probe microscope, i.e. the scanning tunnel microscope, atomic force microscope, electrostatic force microscope, scanning ion microscope, scanning magnetic field microscope, scanning temperature microscope, and scanning friction force microscope.

Note 2 to entry: This note applies to the French language only.

Publication date:2018-12
SourceIEC 62047-1:2016, 2.7.1
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