IEVref:
521-03-17
ID:
Language:
en
Status:
Standard
Term:
sputtering
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition:
process for forming films in which ion bombardment or other application of energy is used to free particles from a solid source that become deposited on a nearby surface
Publication
date
:
2002-05
Source
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5:
process for forming films in which ion bombardment or other application of energy is used to free particles from a solid source that become deposited on a nearby surface