IEVref:
521-10-07
ID:
Language:
en
Status:
Standard
Term:
film (of a film integrated circuit)
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition:
layer of solid material formed by any deposition process upon a substrate or upon other films deposited on a substrate
Publication
date
:
2002-05
Source
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5:
layer of solid material formed by any deposition process upon a substrate or upon other films deposited on a substrate