|Definition:|| system composed of one or more integrated microsized components, such as sensors, actuators, transducers, resonators, oscillators, mechanical components, or electric circuits
Note 1 to entry: In the definition, "microsized" is used to mean a size of less than a few millimetres.
Note 2 to entry: Technologies relating to MEMS are extremely diverse and include fundamental technologies (such as design, material, processing, functional element, system control, energy supply, bonding and assembly, electric circuit, and evaluation), basic sciences (such as micro-science and engineering) as well as thermodynamics on a micro-scale and microtribology.
Note 3 to entry: "MEMS" is the acronym of "micro-electromechanical systems", but was used in the past for "micro-electromechanical device". The singular and plural forms of the term "MEMS" are identical.