IEVref:
841-34-09
ID:
Language:
en
Status:
Standard
Term:
plasma assisted chemical vapour deposition treatment
Synonym1:
PACVD (abbreviation)
Synonym2:
Synonym3:
Symbol:
Definition:
CVD treatment combined with electric activation of gaseous media in conditions of abnormal glow discharge
Publication
date
:
2004-09
Source
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5:
CVD treatment combined with electric activation of gaseous media in conditions of abnormal glow discharge