IEVref:
841-34-10
ID:
Language:
en
Status:
Standard
Term:
plasma assisted physical vapour deposition treatment
Synonym1:
PAPVD (abbreviation)
Synonym2:
Synonym3:
Symbol:
Definition:
PVD treatment assisted by an abnormal glow-discharge for activating ionization processes of vapours and gases and sputtering substrates of compounds being deposited on basis material
Publication
date
:
2004-09
Source
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5:
PVD treatment assisted by an abnormal glow-discharge for activating ionization processes of vapours and gases and sputtering substrates of compounds being deposited on basis material