IEVref:523-05-10ID:
Language:enStatus: Standard
Term: etch stop
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Definition: deposition of a very low etch-rate layer at a controlled depth that effectively terminates the etching process

Note 1 to entry: An etch stop is sometimes used as the termination layer of the etching process. There are two basic types of etch stop that are used in micromachining: dopant etch stop and electrochemical etch stop.


Publication date:2018-12
SourceIEC 62047-1:2016, 2.5.25, modified – The definition has been rewritten.
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