IEVref:
841-22-08
ID:
Language:
en
Status:
Standard
Term:
physical vapour deposition process
Synonym1:
PVD (abbreviation)
Synonym2:
Synonym3:
Symbol:
Definition:
process of producing thin films mainly by using physical evaporation and then deposition
Publication
date
:
2004-09
Source
815-05-13 MOD
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5:
process of producing thin films mainly by using physical evaporation and then deposition