IEVref:
521-05-28
ID:
Language:
en
Status:
Standard
Term:
substrate
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition:
material upon or within which the semiconductor device or circuit elements are fabricated
Publication
date
:
2002-05
Source
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5:
material upon or within which the semiconductor device or circuit elements are fabricated