IEVref:523-01-03ID:
Language:enStatus: Standard
Term: micromachine
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Definition: miniaturized device, the components of which are several millimetres or smaller in size

Note 1 to entry: Various functional devices (such as a sensor that utilizes micromachine technology) are included.


Publication date:2018-12
Source IEC 62047-1:2016, 2.1.3.1
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