Note 1 to entry: LIGA is an acronym for Lithographie, Galvanoformung und Abformung, the German for lithography, electroforming, and moulding. Characteristics of the LIGA process include the ability to mass-produce high aspect-ratio microstructures with a line width of 1 µm to 10 µm and a height of several hundreds of micrometres, to allow the use of a wide range of materials including plastics, metals, and ceramics, and to be combined with silicon semiconductor elements, etc.