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Area Micro-electromechanical systems (MEMS) / Functional elements

IEV ref 523-04-06

en
microcantilever
cantilever produced by micromachining

Note 1 to entry: Microcantilevers are often used in high-resolution microscopes such as the atomic force microscope (AFM).


[SOURCE: IEC 62047-1:2016, 2.4.17]


fr
micropoutre, f
poutre produite par micro-usinage

Note 1 à l’article: Les micropoutres sont souvent utilisées dans les microscopes haute résolution tels que les microscopes à force atomique (AFM).


[SOURCE: IEC 62047-1:2016, 2.4.17]


de
Mikro-Federbalken, m
Mikrocantilever, m

ja
マイクロカンチレバー
微小片持ちはり(梁)

nl BE
microbalk, m

pl
mikrowspornik, m

pt
microtrave

zh
微悬臂梁

Publication date: 2018-12
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